2024年4月11日发(作者：)

光刻制备微流控芯片流程

英文回答：

Fabrication Process of Microfluidic Chips by

Photolithography.

Microfluidic chips are miniaturized devices that

manipulate and analyze fluids on a small scale. They are

used in various applications, including biomedical

diagnostics, drug delivery, and chemical synthesis.

Photolithography is a widely used technique for fabricating

microfluidic chips.

Process Steps:

1. Substrate Preparation: A substrate (e.g., glass or

silicon) is cleaned and coated with a photoresist, a light-

sensitive material.

2. Mask Design and Generation: A mask is designed with

the desired microfluidic channel patterns. The mask blocks

light from reaching certain areas of the photoresist during

exposure.

3. Photolithography: The photoresist-coated substrate

is exposed to ultraviolet light through the mask. The

exposed areas of the photoresist become hardened, while the

unexposed areas remain soft.

4. Development: The exposed photoresist is removed

using a developer solution, leaving behind a patterned

photoresist layer.

5. Etching: The substrate is etched using an etchant

(e.g., hydrofluoric acid) to remove the underlying material

in the patterned areas of the photoresist.

6. Bonding: The etched substrate is bonded to another

substrate (e.g., glass or PDMS) to create the microfluidic

channels.

7. Post-Processing: The microfluidic chip is cleaned

and functionalized with surface treatments or coatings to

enhance its performance.

Advantages:

Precise and high-resolution patterning.

Mass production capabilities.

Compatible with various materials.

Versatile for creating complex chip designs.

中文回答：

微流控芯片光刻制备流程。

微流控芯片是一种在微小尺度上操控和分析流体的微型化器件。

它被用于多种应用中，包括生物医学诊断、药物输送和化学合成。

光刻技术是一种广泛用于微流控芯片制造的技术。

工艺步骤：

1. 基材制备，对基材（例如玻璃或硅片）进行清洗，并涂覆光

刻胶，这是一种光敏材料。

2. 掩膜设计和生成，设计一个带有所需微流控通道模式的掩膜。

该掩膜在曝光时会阻挡光线到达光刻胶的某些区域。

3. 光刻，通过掩膜将光刻胶涂层基材暴露在紫外线下。光刻胶

的曝光区域会变硬，而未曝光区域保持柔软。

4. 显影，使用显影液去除曝光的光刻胶，留下图案化的光刻胶

层。

5. 刻蚀，使用刻蚀剂（例如氢氟酸）对基材进行刻蚀，去除光

刻胶图案区域中的底层材料。

6. 粘合，将刻蚀后的基材粘合到另一个基材（例如玻璃或

PDMS）上，以创建微流控通道。

7. 后处理，对微流控芯片进行清洁，并使用表面处理或涂层进

行功能化，以提高其性能。

优点：

精确、高分辨率的图案化。

批量生产的能力。

与多种材料兼容。

适用于创建复杂芯片设计。